Gigaphoton Introduces “eGRYCOS” for ArF Immersion Lasers
- Gigaphoton’s new “eGRYCOS” product for ArF immersion lasers enhances laser efficiency by 1.2 times, reduces electricity consumption by 15 percent
The semiconductor industry has been growing faster than other sectors, and one of the key drivers is the evolving improvements in manufacturing equipment. Because of their use as light sources in leading-edge lithography applications, ArF immersion lasers require increased output power to support new enhancements of the scanners. Current high-volume production lasers are running at 60 W output, but the latest requirement has reached output of 120 W. As industry demand for higher power grows, the electricity that lasers consume will continue to increase as well.
Gigaphoton has addressed this issue through its EcoPhoton program, and has continued to work on developing a highly efficient laser chamber design. In a laser chamber, excimer gas flows between two electrodes; as the flow speed increases, the discharge becomes more stable, resulting in better laser performance. Gigaphoton’s redesigned chamber features a hydro-dynamically optimized gas flow channel shape, and enables the same speed of gas flow while consuming less electricity. In addition, the newly designed pre-ionization process enables uniform distribution of ions in the main discharge region, providing laser discharge that is 1.2 times more efficient (compared with existing products). As a result, “eGRYCOS” reduces electricity consumption by 15 percent (compared with existing products) without compromising laser performance.
“Gigaphoton has consistently focused on green innovations to support environmentally conscious ‘green fabs’,” said Hitoshi Tomaru, President and CEO of Gigaphoton Inc. “The ‘eGRYCOS’ product is an example of the success of our EcoPhoton program. We will continue to provide our global customers with innovative technologies that enable increased laser performance with lower energy consumption to meet the demands of today’s leading-edge lithography applications.”
About the EcoPhoton™ Program
The EcoPhoton™ program is a roadmap started in 2003 to implement Green Innovations; it focuses on detailed analyses of three key cost-of-ownership (CoO) metrics: cost of consumables (CoC), cost of downtime (CoD), and cost of environment (CoE). The program aims at achieving continuous reduction of these costs by developing innovative green technologies.
About Gigaphoton
Since it was founded in 2000, Gigaphoton has developed and delivered user-friendly, high-performance DUV laser light sources used by major semiconductor chipmakers in the Pan-Asian, US and European regions.
Gigaphoton leads the way with cost-effective, highly productive lithography sources for high-volume production. With a global business outlook, Gigaphoton strives to be the world’s number-one lithography light source provider, focusing on end-user needs in every phase of its business — from research and development to manufacturing, to best-in-class reliability and world-class customer support. For more information, please visit http://www.gigaphoton.com/?lang=en.
Website: http://www.gigaphoton.com/?lang=en
Contact
Gigaphoton Inc.
Corporate Planning Division
Katsutomo Terashima
+81-285-37-6931
web_info@gigaphoton.com
This news is a press release provided by Gigaphoton Inc.. Korea Newswire follows these editorial guidelines.
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2023년 3월 24일 18:08
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2023년 3월 24일 18:03