Gigaphoton Ships Latest ArF Excimer Laser GT65A
Improved downtime of lithography light sources by up to 50%, contributing significantly to increase the availability of lithography equipment
Responding to growing demand for semiconductors
The GT65A will also deliver a 50% reduction in service downtime. This key feature is realized by increasing chamber lifetime by 30% as well as improving maintenance efficiency through the utilization of extensive service data expertise acquired through many years of successful service execution.
In addition, the stabilization technology “eMPL Solid” and the control function “hMPL,” which form the spectrum control function, enable the improvement of CD uniformity as well as expanding process latitude.
Furthermore, the GT65A has successfully eliminated the need to use helium gas. Due to this, we are able to contribute to enhancing customers' sustainability and CSR activities by not only reducing environmental impact, but also by greatly reducing risks associated with future helium gas supply deficits and price increases.
Katsumi Uranaka, President & CEO of Gigaphoton commented, “With the boom in recent years of the semiconductor market, improving the availability of lithography equipment is an important issue for each manufacturer. With the new technology in line with our new roadmap ‘RAM Enhancement,’ we have further strengthened and improved the Reliability, Availability and Maintainability of lithography light sources, contributing to the semiconductor manufacturing industry.”
Past news releases on the GT65A can be found here (http://www.gigaphoton.com/en/news/4938).
Past news releases on RAM Enhancement can be found here (http://www.gigaphoton.com/en/news/5223).
Past news releases on helium free can be found here (http://www.gigaphoton.com/en/news/4682).
About Gigaphoton
Since it was founded in 2000, Gigaphoton has delivered valuable solutions to semiconductor manufacturers throughout the world as a laser supplier. In every stage from R&D to manufacture, sales, and maintenance services, Gigaphoton is committed to providing world-class support delivered from the perspective of everyday users. For more information please visit www.gigaphoton.com
Website: http://www.gigaphoton.com/?lang=en
Contact
Gigaphoton Inc
Corporate Planning Division
Katsutomo Terashima
+81-285-37-6931
web_info@gigaphoton.com
This news is a press release provided by Gigaphoton Inc..
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2024년 12월 5일 14:20