Gigaphoton Ships G200K KrF Light Source for Manufacturing Equipment

News provided by Gigaphoton Inc.
March 20, 2019 09:00

OYAMA, JAPAN--(Business Wire / Korea Newswire) March 20, 2019 -- Gigaphoton Inc. (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a leading manufacturer of light sources used in semiconductor lithography, has announced that it began shipping the G200K KrF light source for processing equipment, which has a maximum output of 200 W, in February 2019.

Gigaphoton announced the high-reliability excimer laser series ”GIGANEX" in 2016, which makes use of the high technological capabilities cultivated through semiconductor lithography; the GT600K excimer laser was released as the first product, for the annealing process in FPD manufacturing. This G200K KrF light source for processing equipment is the second product of “GIGANEX” series. The G200K, with a maximum output of 200 W, is providing high reliability by incorporating with technology for performance stabilization and module lifetime extension on Gigaphoton’s excimer laser basis, and is applied to processing equipment light source that will meet customer needs.

Katsumi Uranaka, President & CEO of Gigaphoton commented, “Gigaphoton’s ‘GIGANEX’ series is based on the concept of applying our long-cultivated excimer laser technology to practical applications in fields outside of semiconductor lithography. This time, we shipped the G200K as our second product of ‘GIGANEX’ series to expand the product portfolio. Gigaphoton will continue to provide solutions through ‘GIGANEX’ to expand our contributions to the industrial world.”


Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a laser supplier. In every stage from R&D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information please visit

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Corporate Planning Division
Kenji Takahisa

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