JEOL: Release of a New Schottky Field Emission(FE) Scanning Electron Microscope JSM-F100

The next level of analytical intelligence in FE-SEM for combining high resolution and operability

News provided by JEOL Ltd.
August 04, 2019 17:00

TOKYO--(Business Wire / Korea Newswire) August 04, 2019 -- JEOL Ltd. (TOKYO:6951) ( (President & COO Izumi Oi) announces the release of a new Schottky field emission scanning electron microscope, JSM-F100 in August 2019.


Scanning electron microscopes(SEMs) are used in various fields; nanotechnology, metals, semiconductors, ceramics, medicine, and biology. With application expansion, SEM users are in need of fast high-quality data acquisition and simple compositional information confirmation with seamless operation.

The JSM-F100 incorporates our highly regarded In-lens Schottky Plus FE electron gun and “Neo Engine”(electron optical control system) as well as a new GUI “SEM Center” and an innovative “LIVE-AI(Live Image Visual Enhancer-Artificial Intelligence) filter”. This enables an optimal combination of high-spatial-resolution imaging and operability. Furthermore, a standard JEOL energy dispersive X-ray spectrometer(EDS) is fully integrated within “SEM Center” for seamless acquisition from images to elemental analysis results. The JSM-F100 achieves superb work efficiency, 50% or higher than that of our previous JSM-7000 series, realizing dramatically-increased high throughput.


1. In-lens Schottky Plus FE electron gun
Enhanced integration of the electron gun and low-aberration condenser lens provides higher brightness. Ample probe current at low accelerating voltage supports various capabilities from high-resolution imaging to high-speed elemental mapping.

2. Hybrid Lens(HL)
The Hybrid Lens(HL), combining the electrostatic and magnetic field lens, supports high-spatial-resolution imaging and analysis of various specimens.

3. Neo Engine(New Electron Optical Engine)
Neo Engine, a cutting-edge electron optical control system, significantly improves the precision of automatic functions and operability.

4. New function of “SEM Center”
A new operation GUI “SEM Center” fully integrates SEM imaging and EDS analysis and provides next-generation operability and high-resolution images obtained with FE-SEM.

5. New “Zeromag” function
“Zeromag”, incorporated for seamless transition from optical to SEM imaging, makes it easy to locate the target specimen area.

6. New LIVE-AI filter*
Utilizing the AI(artificial intelligence) capability, LIVE-AI filter is incorporated for a higher quality of live images. Unlike image integration processing, this new filter displays a seamless moving live image with no residual image and is very effective for quickly searching observation areas, focusing, and stigmator adjustment.


Resolution(1 kV): 1.3 nm
Resolution(20 kV): 0.9 nm
Accelerating voltage: 0.01 to 30 kV
Standard detectors: Upper Electron Detector(UED), Secondary Electron Detector(SED)
Electron gun: In-lens Schottky Plus FE electron gun
Probe current: A few pA to 300 nA(30 kV) / A few pA to 100 nA(5 kV)
Objective lens: Hybrid Lens(HL)
Specimen stage: Full eucentric goniometer stage
Specimen movement: X: 70 mm, Y: 50 mm, Z: 2 to 41 mm / Tilt: -5 to 70°, Rotation: 360°
EDS detector: Energy resolution: 133 eV or less / Detectable elements: B(boron) to U(uranium) / Detection area: 60 mm2

Annual unit sales target

60 units/year

3-1-2, Musashino, Akishima, Tokyo, 196-8558, Japan
Izumi Oi, President & COO
(Stock code:6951, Tokyo Stock Exchange First Section)

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Science and Measurement Instruments Sales Division
Kazunori Kitazumi

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