Gigaphoton unveils technology solutions at SPIE Advanced Lithography + Patterning 2023
It will publish papers at the largest conference on semiconductor lithography technology
Feb. 19, 2023 10:27
Gigaphoton will introduce the latest technology on yield improvement and sustainability solution with DUV lightsources technology. In addition, Gigaphoton will present the progress of research and development on EUV lightsources.
* If you wish to cite the papers in your materials, please contact us.
Oral Presentations:
1) To enhance EPE and availability simultaneously by the leading-edge immersion light source [Paper#: 12494-44]
2) Plasma dynamics and future of LPP-EUV source for semiconductor manufacturing [Paper#: 12494-45]
Papers:
3) Development progress of key components for LPP-EUV light sources [Paper#: 12494-51]
4) The development of a machine learning-based excimer laser performance simulator for engineering maintenance decisions [Paper#: 12496-101]
5) Contributing to sustainability delivers maximizing availability by the latest light source GT66A for the ArF immersion lithography [Paper#: 12494-60]
About GIGAPHOTON
Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of lightsources. In every stage from R&D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit https://gigaphoton.com/
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Website: http://www.gigaphoton.com/?lang=en
Contact
GIGAPHOTON Inc.
Corporate Planning Department
Kenji Ohishi
TEL: +81-285-37-6931
Email: web_info@gigaphoton.com
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